Harnessing thermoreflectance for comprehensive semiconductor testing In the field of semiconductor electronics, thermal metrology has become increasingly problematic. Conventional measurement methods often fail to produce accurate, repeatable results, especially for thin films and other materials at the nanoscale. That’s why the thermal metrologists, physicists, and material scientists at Laser Thermal moved away from conventional approaches...
As the only player in the small-scale thermal measurements market, Laser Thermal is used to standing out. That’s why it came as no surprise when America’s SBDC Virginia chose to highlight our small business in March of 2024, to join us in celebrating our achievement of over $1 million in sales in the past year....
Since 2005, Edge Scientific has specialized in representing the world’s most respected manufacturers of nanotechnology solutions. CHARLOTTESVILLE, VA, March 27, 2024 – Laser Thermal, a leading provider of advanced thermal property measurement tools, is pleased to announce the signing of Edge Scientific as its exclusive representative for sales of the company’s SSTR-F thermal conductivity and...
SSTR measurements on ALD grown ultrathin film amorphous gate dielectrics (compared to TDTR) (source).
SSTR measurements of AlN crystalline thin films.2 SSTR data (temperature rise vs. power) on right for AlN film and silicon wafer control.
| Literature Value | TPS Measurement | SSTR-F Measurement | |
| Pyroceram 9606 | 4.07 +/- .26 | 3.95 | 3.95 +/- 0.2 |
| HPFS 7980 | 1.38 | 1.39 | 1.39 +/- 0.09 |
20 SSTR-F measurements at same spot
20 SSTR-F measurements at random spots
SSTR-F data on 4 different 200 nm dielectric films on silicon with thermal conductivity ranging from ~0.35 W/m/K up to 1.8 W/m/K. SSTR-F allows for easy, rapid and automated identification of different temperature rises based on the thermal conductivity of the different films.