Build the Future Generation of Semiconductor Chips

Get accurate, repeatable thermal conductivity data for every material you use with SSTR-F.

Beat Your Competition to Market

Reduce R&D Timelines

Build Better, Faster Products

Work Arounds Aren’t Good Enough

We know you’ve been stuck using workarounds, best guesses, and approximations when it comes to thermal data--many of which don’t hold up in real-world applications--because you’ve never had a tool that directly measures the thermal conductivity of semiconductor materials, interfaces substrates, and thin films.

That’s why we created SSTR-F--the first tool of its kind to bring fast, easy, accurate thermal conductivity and thermal resistance testing in-house for semiconductor manufacturers.

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Better Testing. Better Products.

If you want your devices to not just perform as modeled, but to be faster and more powerful, you’ve got to use accurate, reliable thermal data.

Optimize Performance

By having data on the thermal properties of every material in your devices, you can make better informed decisions and enhance function.

Solve Problems

When you understand the thermal metrology of your materials, you can pinpoint the problems, identify solutions, and enable the team with answers.

Get to Market Faster

Instead of model after model, cut straight to the solutions so you can shrink R&D and present your innovations ahead of your competitors.

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The Missing Piece to the Optimization Puzzle

Bringing thermal testing in house with SSTR-F doesn't just make your job easier now, but streamlines your thermal metrology practices for the future.

Get in on the ground floor of the thermal metrologies revolution.

Catalog & Create Baselines

Using the results of your testing, you can create a bank of reliable measurements for future projects so you can plug and play with numbers you trust.

Customize Data Processing

Get the data you want, in the format you want it. Our team works with you to customize software and uses your input for the next generation of hardware.

Innovate & Move Forward

Change your outlook from limitations to possibility with data that supports your innovations and fuels your faster, better, superior products.

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Designed for the Real World

Check out our case studies.

R&D

Semiconductor Innovation

Yield Improvement

Your Competitors Aren’t Slowing Down

Beat them to market with Laser Thermal

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Nanoscale to bulk

Thermal conductivity of nanoscale thin films

SSTR is ideal for your thin film thermal conductivity testing needs.
In addition to measurements of bulk wafers and substrates (source 1, source 2), SSTR has the unprecedented spatial resolution to measure the thermal conductivity of thin films.
For example, SSTR can measure the thermal conductivity of single nanometer thick ALD grown thin films or micron thick AlN films (source).

SSTR measurements on ALD grown ultrathin film amorphous gate dielectrics (compared to TDTR) (source).

SSTR measurements of AlN crystalline thin films.2 SSTR data (temperature rise vs. power) on right for AlN film and silicon wafer control.

Validated results

SSTR-F measures the thermal conductivity of Corning Pyroceram 9606 and Corning high purity fused silica (HPFS) 7980 to within 5% of their published values.
Additional validation was provided by measuring samples from the same piece of material using the Transient Plane Source technique.
Pyroceram is no longer available from NIST but was measured on similar material to the material that was validated as a Certified Reference Material.
Corning HPFS was procured from a distributor of HPFS 7980 wafers.

	Literature Value	TPS Measurement	SSTR-F Measurement
Pyroceram 9606	4.07 +/- .26	3.95	3.95 +/- 0.2
HPFS 7980	1.38	1.39	1.39 +/- 0.09

Unparalleled reliability

Thermal conductivity measurements: Accuracy +/- 10%, Repeatability +/- 0.5%, Reproducibility +/- 1%
Accurate thermal conductivity measurements of materials in agreement with literature values
With exceptional instrumentation reliability and repeatability, SSTR-F offers unprecedented measurement stability on a daily basis for any user, exemplified by the SSTR-F data shown below. Spread in randomly sampled spots are sample related, not measurement driven.

Source

20 SSTR-F measurements at same spot

20 SSTR-F measurements at random spots

Turnkey testing

Our patented fiber-optic design enables turnkey, automated testing of thermal conductivity.
High-throughput SSTR-F testing of multiple samples facilitates, for example, screening the thermal conductivity of different thin films processed under different conditions
Defects, stresses, compositional differences, and changes in density and microstructure that occur up during film growth result in changes in thermal conductivity, easily and rapidly identified vis SSTR-F

SSTR-F data on 4 different 200 nm dielectric films on silicon with thermal conductivity ranging from ~0.35 W/m/K up to 1.8 W/m/K. SSTR-F allows for easy, rapid and automated identification of different temperature rises based on the thermal conductivity of the different films.